Method for error correction in scanning probe microscopy
US10670625B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 12, 2017 |
| Grant date | Jun 2, 2020 |
| Priority date | — |
| Expiry date | Jul 14, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed here is a scanning probe microscope system and method for operating the same for producing scanning probe microscope images at fast scan rates and reducing oscillation artifacts. In some embodiments, an inverse consistent image registration method is used to align forward and backward scan traces for each line of the scanning microscope image. In some embodiments, the aligned forward and backward scan traces are combined using a weighting factor favoring the scan trace with higher smoothness. In some embodiments, the scanning probe microscope image is a potentiometry map and a method is provided to extract from the potentiometry map a conductivity map.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.