Transfer chamber
US10672632B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 5, 2016 |
| Grant date | Jun 2, 2020 |
| Priority date | — |
| Expiry date | Feb 5, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2258/02
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.