Mask extension welding device for thin film deposition
US10675711B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 14, 2016 |
| Grant date | Jun 9, 2020 |
| Priority date | — |
| Expiry date | Jan 3, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/24
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A mask extension welding apparatus for thin film deposition to extend and weld a mask on a frame includes an extension unit configured to extend the mask in a first direction, a pressure unit configured to press the mask towards the frame, and a laser welding unit configured to weld the mask and the frame. The pressure unit includes an upper housing, a lower housing spaced apart from the upper housing with respect to a fluid inlet, and a porous plate disposed at a downstream of the fluid inlet, the porous plate connecting the upper housing and the lower housing, and configured to eject a fluid supplied through the fluid inlet towards the mask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.