Microelectromechanical system (MEMS) device readout with optical directional coupler
US10677594B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2018 |
| Grant date | Jun 9, 2020 |
| Priority date | — |
| Expiry date | Dec 14, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12147
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical systems (MEMS) device comprises an optical directional coupler comprising: a first waveguide having a first and a second end, wherein a light beam is introduced into the first end; a second waveguide having a third and a fourth end, wherein the light beam is evanescently coupled between the two waveguides in the central region; a first photodetector to detect first optical power in the light beam at the second end; and a second photodetector to detect second optical power in the light beam at the fourth end; a vibrating proof mass adjacent to the coupler in a first direction from the coupler, wherein when inertial forces are applied to the MEMS device in a second direction, the proof mass moves in the first direction; a processor to determine the displacement of the proof mass from the coupler as a function of the first and the second optical power.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.