Patent · US Active

Vibration sensor and method for optimizing a piezoelectric drive

US10677643B2 · kind B2 · utility

0Cited by

2References

15Claims

0Family size

Assignee

VEGA Grieshaber KG · DE

Inventors

Volker Allgaier · Lenzkirch, DE
Holger Gruhler · Tuningen, DE
Dominik Fehrenbach · Rottweil, DE

Key dates

Filing date	Jul 5, 2017
Grant date	Jun 9, 2020
Priority date	—
Expiry date	Jul 5, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG01N2009/006
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The a vibration sensor comprising a membrane that can be stimulated so as to oscillate by means of a piezoelectric drive, and a mechanical oscillator arranged on the membrane, at least one piezoelectric element of the drive comprising at least one first electrical contact structure on an upper side of the piezoelectric element and at least one second electrical contact structure on a lower side of the piezoelectric element, such that the at least one piezoelectric element is designed so that an active area of the piezoelectric element corresponds to an area of a mechanical deformation of the unidirectional curvature of the membrane, during a pre-defined eigenmode of the mechanical oscillator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.