Low frequency impedance measurement with source measure units
US10677828B2 · kind B2 · utility
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Key dates
| Filing date | Oct 21, 2017 |
| Grant date | Jun 9, 2020 |
| Priority date | — |
| Expiry date | Apr 11, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R27/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for measuring the impedance of a DUT having a capacitance of less than 1 pF includes applying a voltage or current signal to the DUT, the voltage or current signal including an AC component having a non-zero frequency of less than 1 kHz; monitoring a current or voltage signal, respectively, through the DUT in response to the voltage or current signal; digitizing the voltage signal and the current signal synchronously; and calculating the impedance from the digitized voltage and current signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.