Zoom system with interchangeable optical elements
US10678033B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 22, 2017 |
| Grant date | Jun 9, 2020 |
| Priority date | — |
| Expiry date | Feb 25, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70191
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for adjusting the magnification scale of an optical imaging device for exposing or inspecting substrates is provided. The optical imaging device includes a first optical element group, which includes a plurality of first optical elements in an imaging beam path. The method includes replacing optical elements of the first optical element group in the imaging beam path by optical elements of a second optical element group for the purposes of adjusting the magnification scale. The first optical element group includes two reflecting optical elements with first optical parameters, which define a first Petzval sum. The second optical element group includes two reflecting optical elements with second optical parameters, which define a second Petzval sum. The value of the first Petzval sum is at least substantially identical to the value of the second Petzval sum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.