Air bearing with variable air delivery

US10683894B2 · kind B2 · utility

Assignee

• Carl Zeiss Industrielle Messtechnik GmbH · DE

Inventors

• Malte Langmack · Aalen, DE
• Steffen Strauss · Regensburg, DE
• Wolfgang Strauss · Senden, DE
• Raphael Koch · Neu-Ulm, DE
• Christof Poglitsch · Aalen, DE
• Holger Hofmann · Bad Mergentheim, DE
• Nikolai Zeller · Jagstzell, DE

Key dates

• Filing date: Mar 25, 2018
• Grant date: Jun 16, 2020
• Expiry date: Mar 25, 2038

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F16C2370/00
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

An air bearing for movably bearing at least two elements includes a bearing main body with a first air outflow channel and a second air outflow channel. The first air outflow channel is supplied with air via at least one first air delivery device. The second air outflow channel is supplied with air via at least one second air delivery device. A sensor detects at least one of a bearing stroke, a bearing pressure, and a bearing throughflow, and a controller adjusts the supply of the air to at least one of the first air outflow channel and the second air outflow channel in accordance with the at least one of the bearing stroke, the bearing pressure, and the bearing throughflow.