Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber
US10684009B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Dec 23, 2019 |
| Grant date | Jun 16, 2020 |
| Priority date | — |
| Expiry date | Dec 23, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E20/34
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.