Patent · US Active

Apparatus and method for in-line holographic imaging

US10684589B2 · kind B2 · utility

4Cited by

0References

17Claims

0Family size

Assignee

IMEC VZW · BE

Inventors

Abdulkadir Yurt · Heverlee, BE
Geert Vanmeerbeeck · Keerbergen, BE
Richard Stahl · Rotselaar, BE
Ziduo Lin · Heverlee, BE

Key dates

Filing date	Dec 19, 2017
Grant date	Jun 16, 2020
Priority date	—
Expiry date	Jul 17, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG03H2222/34
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An apparatus for in-line holographic imaging is disclosed. In one aspect, the apparatus includes at least a first light source and a second light source arranged for illuminating an object arranged in the apparatus with a light beam. The apparatus also includes an image sensor arranged to detect at least a first and a second interference pattern, wherein the first interference pattern is formed when the object is illuminated by the first light source and the second interference pattern is formed when the object is illuminated by the second light source. The first and second interference patterns are formed by diffracted light, being scattered by the object, and undiffracted light of the light beam. The at least first and second light sources are arranged at different angles in relation to the object, and possibly illuminate the object using different wavelengths.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.