Film bulk acoustic resonator oscillators and gas sensing systems using the same
US10686405B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 16, 2017 |
| Grant date | Jun 16, 2020 |
| Priority date | — |
| Expiry date | Apr 4, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0256
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A resonator oscillator that may be included in a gas sensing system may include an oscillator that may be electrically connected to an external resonator through a conductive line. The oscillator may generate an oscillating signal having a frequency corresponding to a resonance frequency of the external resonator in an oscillating path. A spurious resonance removal circuit on the oscillating path may remove spurious resonance caused by the conductive line from the oscillating path. A gas sensing system may include the oscillator, a resonator that includes a sensor configured to sense a gas, and a frequency counting logic that receives the oscillating signal and a reference clock signal, performs a counting operation on the oscillating signal according to a logic state of the reference clock signal to generate a counted value, and generate a gas sensing output indicating a sensed gas based on the counted value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.