Method for coating a substrate and coating device

US10688524B2 · kind B2 · utility

Assignee

• SUSS MICROTEC LITHOGRAPHY GMBH · DE

Inventors

• Katrin Fischer · Stuttgart, DE
• Florian Palitschka · Gauting, DE
• Johannes Platen · Hohenwestedt, DE
• Kento Kaneko · Munich, DE

Key dates

• Filing date: Sep 22, 2015
• Grant date: Jun 23, 2020
• Expiry date: Sep 22, 2035

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B05D3/107
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method for coating a substrate with a lacquer includes spraying lacquer onto the substrate and subsequently spraying the applied lacquer with solvent. In some embodiments, before the solvent is sprayed the lacquer is heated. Also disclosed is a corresponding coating device for lacquering substrates.