Evaporation device
US10689747B2 · kind B2 · utility
0Cited by
5References
29Claims
0Family size
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Key dates
| Filing date | Apr 14, 2017 |
| Grant date | Jun 23, 2020 |
| Priority date | — |
| Expiry date | Sep 1, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/24
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An evaporation device including an evaporation chamber and mask supporting coils is provided. The mask supporting coils include at least a first coil and a second coil disposed opposite to each other. A mask disposing area is disposed between the first coil and the second coil. A first current is provided in the first coil, and a second current is provided in the second coil, so that a magnetic field with a homogeneous magnetic field strength is generated in the mask disposing area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.