Patent · US Active

Laser sustained plasma light source with forced flow through natural convection

US10690589B2 · kind B2 · utility

4Cited by

14References

50Claims

0Family size

Assignee

KLA-TENCOR CORPORATION · US

Inventors

Ilya Bezel · Mountain View, US
Kenneth P. Gross · Redwood City, US
John Szilagyi · Livermore, US

Key dates

Filing date	Jul 24, 2018
Grant date	Jun 23, 2020
Priority date	—
Expiry date	Jul 24, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/255
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A broadband radiation source is disclosed. The system may include a plasma containment vessel configured to receive laser radiation from a pump source to sustain a plasma within gas flowed through the plasma containment vessel. The plasma containment vessel may be further configured to transmit at least a portion of broadband radiation emitted by the plasma. The system may also include a recirculation gas loop fluidically coupled to the plasma containment vessel. The recirculation gas loop may be configured to transport heated gas from an outlet of the plasma containment vessel, and further configured to transport cooled gas to an inlet of the plasma containment vessel.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.