Sensor for measuring the carbon dioxide concentration in a gas mixture, and method for manufacture thereof
US10690612B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 26, 2015 |
| Grant date | Jun 23, 2020 |
| Priority date | — |
| Expiry date | Jun 2, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2027/222
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor is configured to measure the carbon dioxide concentration in a gas mixture. The sensor has a dielectric layer arranged between a layer-like first electrode and a layer-like second electrode. The second electrode is a composite electrode that has at least one carbonate and/or one phosphate as first material and at least one metal as second material. This sensor can be manufactured by a method comprising applying a layer-like first electrode to a substrate, applying a dielectric layer to the first electrode, and applying a layer-like second electrode to the dielectric layer. The second electrode is applied as a composite electrode that has at least one carbonate and/or one phosphate as first material and has at least one second material that has an electrical conductivity of more than 10-2 S/m.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.