System and method for providing a clean environment in an electron-optical system
US10692692B2 · kind B2 · utility
0Cited by
34References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 25, 2016 |
| Grant date | Jun 23, 2020 |
| Priority date | — |
| Expiry date | May 25, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/182
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron extractor of an electron source capable of absorbing contaminant materials from a cavity proximate to the extractor is disclosed. The electron extractor includes a body. The body of the electron extractor is formed from one or more non-evaporable getter materials. The one or more non-evaporable getter materials absorb one or more contaminants contained within a region proximate to the body of the electron extractor. The body of the electron extractor is further configured to extract electrons from one or more emitters posited proximate to the body of the electron extractor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.