Patent · US Active

Sensor component with cap over trench and sensor elements

US10693057B2 · kind B2 · utility

0Cited by

6References

13Claims

0Family size

Assignee

TDK—Micronas GmbH · DE

Inventors

Marc Baumann · Glückstadt, DE
Thilo Rubehn · Gundelfingen, DE
Christian Joos · Ehrenkirchen, DE
Jochen Stephan · Glückstadt, DE

Key dates

Filing date	Apr 11, 2018
Grant date	Jun 23, 2020
Priority date	—
Expiry date	Apr 11, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH10N59/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A component is provided comprising at least one substrate, at least one magnetic field sensor and at least one trench in the at least one substrate surrounds the at least one magnetic field sensor at least partially. At least one cap covers the at least one trench and the at least one magnetic field sensor, and at least one layer element arranged between the at least one cap and the at least one substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.