Systems and methods for bias suppression in a non-degenerate MEMS sensor
US10696541B2 · kind B2 · utility
2Cited by
31References
17Claims
0Family size
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Key dates
| Filing date | Mar 22, 2017 |
| Grant date | Jun 30, 2020 |
| Priority date | — |
| Expiry date | Jun 14, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0118
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for suppressing bias in a non-degenerate vibratory structure are provided. In certain embodiments, a vibratory structure includes a first proof mass; a second proof mass, wherein the first proof mass and the second proof mass are driven into motion along a first axis, wherein the first proof mass and the second proof mass move in anti-phase along a second axis, wherein the motion of the first proof mass and the second proof mass along the second axis is such that the centers of mass of the first proof mass and the second proof mass move collinearly along a same axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.