Patent · US Active

Evaporating device and evaporating method

US10697055B2 · kind B2 · utility

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1References

11Claims

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Assignees

Inventors

Jian Xu · Lo Wu, CN
Yaoyang Liu · Shanghai, CN

Key dates

Filing date	May 25, 2017
Grant date	Jun 30, 2020
Priority date	—
Expiry date	Jan 25, 2038

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/042
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Embodiments of the present disclosure disclose an evaporating device and an evaporating method. The evaporating device comprises: a Halbach magnet array and a mask setting region. A magnetization direction of at least part of the Halbach magnet array precesses clockwise or counter-clockwise, so that magnetic fields having different magnetic fields are formed at two sides of the Halbach magnet array; and the mask setting region is disposed within the magnetic field at one side of the Halbach magnet array. The mask of the ferromagnetic material is placed in the evaporating device provided by the embodiments of the present disclosure. The mask is subject to an attractive force of the Halbach magnet array.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.