X-ray tensor tomography system

US10697902B2 · kind B2 · utility

Assignee

• TECHNISCHE UNIVERSITÄT MÜNCHEN · DE

Inventors

• Yash Sharma · Delhi, IN
• Tobias Lasser · Munich, DE
• Franz Pfeiffer · Unterföhring, DE

Key dates

• Filing date: Jun 13, 2017
• Grant date: Jun 30, 2020
• Expiry date: Jul 13, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2223/419
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The present invention relates to an X-ray tensor tomography (XTT) system (34), comprising a source (12) for providing a beam with coherent X-rays, a first grating (16) with first grating lines and a second grating (18) with second grating lines, the second grating lines being parallel to the first grating lines and the XTT-system (34) being configured to relatively shift the first grating (16) and/or the second grating (18) in a shifting direction (32) being parallel to the planes of the gratings (16, 18), a stage (36) for rotating the specimen about a first axis of rotation and about not more than two axes of rotation (26), the first axis of rotation lying in a plane (38) being tilted by an angle ψ with respect to the to the planes of the gratings (16, 18), wherein 0°<ψ≤90°, and by an angle β with respect to a plane being orthogonal to the direction of the beam path at a location of the stage (36), wherein 0°<β<90°, a detector (22), a reconstruction unit configured to reconstruct scattering tensors for a specimen.