Shape measuring apparatus and method for manufacturing target object to be coated
US10704898B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 10, 2017 |
| Grant date | Jul 7, 2020 |
| Priority date | — |
| Expiry date | Feb 2, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A shape measuring apparatus includes: a light source; a two-beam interference objective lens; an imaging device; an observation optical system; a positioning device; and a control device. The control device calculates, for each unit region in the plurality of images obtained by the imaging device, as a focus position of the unit region, a position of the two-beam interference objective lens at which a luminance-based evaluation value is maximized over the plurality of images, and the control device measures a shape of a target object based on the focus position of each unit region in the plurality of images. The control device uses, as the evaluation value, a luminance of each unit region in the plurality of images as well as a value correlated with a difference between the luminance of the unit region and luminances of a plurality of unit regions adjacent to the unit region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.