MEMS rotation rate sensor including combined driving and detection

US10704909B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Patrick Wellner · Neckartenzlingen, DE
• Burkhard Kuhlmann · Reutlingen, DE
• Mirko Hattass · Stuttgart, DE

Key dates

• Filing date: May 24, 2016
• Grant date: Jul 7, 2020
• Expiry date: Oct 22, 2036

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2201/025
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A rotation rate sensor including a substrate having a principal plane of extension, and a structure movable with respect to the substrate; the structure being excitable from a neutral position into an oscillation having a movement component substantially parallel to a driving direction, which is substantially parallel to the principal plane of extension. To induce the oscillation, the rotation rate sensor includes a comb electrode moved along with the structure and a comb electrode fixed in position relative to the substrate. The excitation is produced by applying a voltage to the moving comb electrode and/or to the stationary comb electrode. Due to a rotation rate of the rotation rate sensor about an axis running substantially perpendicularly to the driving direction and substantially perpendicularly to the detection direction, a force applied to the structure with a force component along a detection direction substantially perpendicular to the driving direction is detectable.