Method and apparatus for positioning a micro- or nano-object under visual observation

US10705115B2 · kind B2 · utility

Assignees

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR
• CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE · FR
• UNIVERSITÉ DU MANS · FR

Inventors

• Stéphane Campidelli · Maurepas, FR
• Renaud Cornut · Châtillon, FR
• Vincent Derycke · Montigny-le-Bretonneux, FR
• Dominique Ausserre · Le Mans, FR
• Manuel Ausserre · Val-de-Reuil, FR

Key dates

• Filing date: Mar 23, 2017
• Grant date: Jul 7, 2020
• Expiry date: Mar 23, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/187
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method is provided for positioning a micro- or nano-object on a planar support by displacement performed under visual control, wherein the micro- or nano-object is immersed in a transparent medium, called ambient medium, having a refractive index n3; the planar support comprises a transparent substrate of refractive index n0>n3 on which is deposited at least one optically absorbent layer, adapted to behave as antireflection coating when it is lit at normal incidence with a lighting wavelength λ through the substrate; and the visual control comprises the lighting of the micro- or nano-object at least with the wavelength λ through the substrate, and the observation thereof also through the substrate. A method to scanning probe microscopy and to the assembly of nanostructures is provided.