Mass flow controller and controller algorithm
US10705543B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 29, 2018 |
| Grant date | Jul 7, 2020 |
| Priority date | — |
| Expiry date | Sep 26, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A mass flow controller that includes a linearization system to control the linear response of a valve in order to control the gain of the mass flow controller. The linearization system includes a flow modeling system for processing at least one of a fluid type, a flow rate, a pressure, and a temperature value signal relating to flow of the fluid through a flow path and determining fluid properties. The linearization system also includes a valve modeling system to determine the required operational characteristics of the valve according to valve specifications, a desired flow rate, and the determined fluid properties. The linearization system determines a gain to control the lift of the valve in order to acquire a desired fluid flow rate. The gain is determined by calculating the derivative of predicted lift with respect to fluid flow and the derivative of drive with respect to predicted lift.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.