Metal-on-metal capacitors
US10707162B2 · kind B2 · utility
0Cited by
11References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 10, 2019 |
| Grant date | Jul 7, 2020 |
| Priority date | — |
| Expiry date | Oct 10, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/716
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Capacitor structures with pitch-matched capacitor unit cells are described. In an embodiment, the capacitor unit cells are formed by interdigitated finger electrodes. The finger electrodes may be pitch-matched in multiple metal layers within a capacitor unit cell, and the finger electrodes may be pitch-matched among an array of capacitor unit cells. Additionally, border unit cells may be pitch-matched with the capacitor unit cells.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.