Piezoelectric element

US10707404B2 · kind B2 · utility

Assignee

• TDK CORPORATION · JP

Inventors

• Yoshiki Ohta · Tsurugashima, JP
• Satoshi Sasaki · Ozu, JP
• Yoshiaki Ohta · Yokohama, JP
• Takahiro Kezuka · Tokyo, JP
• Katsuya Inaba · Tokyo, JP
• Rin Sato · Tokyo, JP
• Kazushi Tachimoto · Tokyo, JP
• Masayoshi Inoue · Tokyo, JP
• Yuzo Komatsu · Tokorozawa, JP

Key dates

• Filing date: Jul 3, 2017
• Grant date: Jul 7, 2020
• Expiry date: Sep 30, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N30/872

Abstract

In a piezoelectric element, internal stress generated in an inactive portion at the time of sintering when a piezoelectric element is fabricated or stress applied from the outside to the inactive portion is absorbed by a recess of a lower surface of a first through hole conductor and a recess of an upper surface of a second through hole conductor. Accordingly, for example, deformation, rupture, or the like of the through hole conductor is prevented, and conduction failure or disconnection of an electrode layer or a through hole conductor is prevented. Further, in the inactive portion, since a protrusion of the piezoelectric layer enters the recess of the through hole conductor, a holding force of the piezoelectric layer with respect to the through hole conductor increases, and deformation of the through hole conductor is prevented or obstructed.