Tungsten pentachloride conditioning and crystalline phase manipulation
US10710896B2 · kind B2 · utility
0Cited by
6References
10Claims
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Key dates
| Filing date | Apr 30, 2018 |
| Grant date | Jul 14, 2020 |
| Priority date | — |
| Expiry date | Sep 29, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2002/72
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Conditioning of tungsten pentachloride to form specific crystalline phases is disclosed. The specific crystalline phases permit stable vapor pressures over extended periods of time during vapor deposition and etching processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.