Pressure sensor

US10712218B2 · kind B2 · utility

Assignee

• InvenSense, Inc. · US

Inventors

• Johannes Schumm · Zürich, CH
• Andreas Reinhard · Zollikon, CH
• Thomas Kraehenbuehl · Zürich, CH
• Stefan Thiele · Kahl am Main, DE
• Rene Hummel · Baar, CH
• Chung-Hsien Lin · Hsinchu, TW
• Wang Su · East Patchogue, US
• Tsung Lin Tang · Hsinchu, TW
• Chia-Ming Lin · Taichung, TW

Key dates

• Filing date: Mar 29, 2019
• Grant date: Jul 14, 2020
• Expiry date: Mar 29, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2224/11
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor includes a deformable membrane that deflects in response to a stimuli. The sensor further includes a capacitive element coupled to the deformable membrane. The capacitive element is disposed within an enclosed cavity of the sensor. The capacitive element changes capacitance in response to the deformable membrane deflecting. The capacitive element comprises a getter material for collecting gas molecules within the enclosed cavity.