Patent · US Active

Pressure sensor and method for monitoring a pressure sensor

US10712219B2 · kind B2 · utility

0Cited by

5References

14Claims

0Family size

Assignee

Endress+Hauser SE+Co. KG · DE

Inventors

Max Jehle · Wehr, DE
Davide Parrotto · Weil am Rhein, DE
Thomas Uehlin · Schopfheim, DE

Key dates

Filing date	Jun 22, 2016
Grant date	Jul 14, 2020
Priority date	—
Expiry date	Feb 14, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG01L9/0054
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A pressure sensor for determining a pressure measurement variable includes a housing, a pressure sensor element arranged in the housing, a lighting means arranged in the housing and a control/evaluation unit, the pressure sensor element having a semiconductor material and a measuring membrane, which has at least one integrated resistance element. When the measuring membrane experiences a pressure dependent deflection, the control/evaluation unit ascertains using the integrated resistance element, an electrical signal for determining the pressure measurement variable, wherein the lighting means optically excites the integrated resistance element, and the control/evaluation unit ascertains, based on a change of the electrical signal caused by the optical excitation, whether a malfunction of the pressure sensor is present.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.