Patent · US Active

Cleaning-performance evaluation system

US10712267B2 · kind B2 · utility

1Cited by
0References
7Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 2, 2018
Grant dateJul 14, 2020
Priority date
Expiry dateFeb 2, 2038

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/53
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The present invention provides a cleaning-performance evaluation system that can acquire evaluation results in real time as quantitative values without such factors as the experience of evaluators causing variations in evaluations.The present invention includes: a contamination means for administering a mock contaminant to the inside of a work chamber; a waste liquid recovery means for performing a cleaning operation and recovering a cleaning waste-liquid that contains the mock contaminant; a mist generation means for generating a mist of the cleaning waste-liquid; a collection means for collecting inspection air that includes the generated mist; and a detection means for detecting the amount of the mock contaminant included in the inspection air collected by the collection means. The present invention evaluates the cleaning operation by confirming that the amount of the mock contaminant detected by the detection means is at or below a prescribed value.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.