High resolution surface particle detector
US10712355B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 5, 2018 |
| Grant date | Jul 14, 2020 |
| Priority date | — |
| Expiry date | Aug 22, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1486
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A particle counting device includes a scanner probe having a first opening for receiving particles from a sample surface and second openings. Pumps produce a first airstream flowing from the first opening and a second airstream flowing to the second openings. A flow device splits the first airstream into third and fourth airstreams. A first particle detector detects particles in the third airstream. The first particle detector is capable of detecting particles within a first range of particle sizes. A second particle detector detects particles in the fourth airstream. The second particle detector is capable of detecting particles within a second range of particle sizes different from the first range of particle sizes. Control circuitry controls the flow device and the pumps to provide a first flow rate of the third airstream and a second flow rate of the fourth airstream that is larger than the first flow rate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.