Metrology devices for rapid specimen setup
US10712364B2 · kind B2 · utility
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36References
21Claims
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Key dates
| Filing date | Nov 3, 2016 |
| Grant date | Jul 14, 2020 |
| Priority date | — |
| Expiry date | Nov 3, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An example metrology device can include a first stage including a microelectromechanical (MEMS) device having a probe, and a second stage configured to hold a sample. The metrology device can also include a kinematic coupler for constraining the first stage in a fixed position relative to the second stage. The probe of the MEMS device can be aligned with a portion of the sample when the first stage is constrained in the fixed position relative to the second stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.