Integrated microfabricated vapor cell sensor with transparent body having two intersecting signal paths
US10718661B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 14, 2017 |
| Grant date | Jul 21, 2020 |
| Priority date | — |
| Expiry date | Aug 20, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG04F5/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated microfabricated vapor cell sensor includes a transparent sensor cell body. The cell body has a cavity for a sensor fluid vapor which is covered by a first plate attached to the cell body. The sensor has a first signal path extending from a first signal emitter, through the cell body, through the cavity, through the cell body again, and to a first signal detector, and a second signal path extending through the cavity. The second signal path intersects the first signal path in the cavity. The second signal path may extend through the cell body, or may extend through the first plate. The signal emitters and signal detectors are located in the integrated microfabricated vapor cell sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.