Stray magnetic field robust magnetic field sensor and system

US10718825B2 · kind B2 · utility

Assignee

• NXP B.V. · NL

Inventors

• Stephan Marauska · Kaltenkirchen, DE
• Jörg Kock · Burgwedel, DE
• Hartmut Matz · Hamburg, DE
• Mark Isler · Lebanon, US
• Dennis Helmboldt · Halstenbek, DE

Key dates

• Filing date: Sep 13, 2017
• Grant date: Jul 21, 2020
• Expiry date: Sep 1, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N35/80
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A magnetic field sensor includes a magnetic sense element and a shield structure formed on a substrate. The shield structure fully encircles the magnetic sense element for suppressing stray magnetic fields along a first axis and a second axis, both of which are parallel to a surface of the substrate and perpendicular to one another. A magnetic field is oriented along a third axis perpendicular to the surface of the substrate, and the magnetic sense element is configured to sense a magnetic field along the first axis. A magnetic field deflection element, formed on the substrate proximate the magnetic sense element, redirects the magnetic field from the third axis into the first axis to be sensed as a measurement magnetic field by the magnetic sense element. At least two magnetic field sensors, each fully encircled by a shield structure, form a gradient unit for determining a magnetic field gradient.