Patent · US Active

Method and apparatus for determining a defocusing valve and for image-based determination of a dimensional size

US10719915B2 · kind B2 · utility

0Cited by

6References

13Claims

0Family size

Assignee

Carl Zeiss Industrielle Messtechnik GmbH · DE

Inventors

Philipp Jester · Heidenheim, DE
Oliver Schwarz · Rainau, DE
Michael Totzeck · Schwäbisch Gmünd, DE
Matthias Barnert · Jena, DE
Dirk Doering · Erfurt, DE
Rainer Schmidt · Jena, DE

Key dates

Filing date	Feb 22, 2017
Grant date	Jul 21, 2020
Priority date	—
Expiry date	Apr 13, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG06T2207/30168
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

The invention relates to an apparatus and a method for determining a defocussing value (Δz, Δz1, Δz2) for at least one image feature in an image, wherein at least one monochromatic image of an object is generated, wherein the defocussing value (Δz, Δz1, Δz2) is determined on the basis of the image and depending on the wavelength (λ) of the monochromatic image, and a method and apparatus for image-based determination of a dimensional size.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.