Electron beam irradiating device
US10720256B2 · kind B2 · utility
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4References
3Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 2, 2017 |
| Grant date | Jul 21, 2020 |
| Priority date | — |
| Expiry date | Nov 2, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J33/04
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided is an electron beam irradiating device capable of emitting an electron beam from an electron beam generation source surrounded by a vacuum chamber to outside of the vacuum chamber through an electron beam exit window. The electron beam exit window includes: a grid; a window foil allowing the electron beam to pass therethrough; and a frame-shaped pressing member pressing the window foil against the grid. The surface of the grid has a groove section having an annular shape. A metal gasket is pressed between the groove section and the window foil.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.