Optical element and method for manufacturing optical element
US10720746B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 31, 2019 |
| Grant date | Jul 21, 2020 |
| Priority date | — |
| Expiry date | May 31, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/4062
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical element includes an optical waveguide layer. The optical waveguide includes a periodic structure of grooves. The optical waveguide layer has a layer-thickness equal to or greater than 1.5 μm and is made of material selected from a group consisting of Ta2O5, Al2O3, LiNbO3, LiTaO3, AlN, GaN, SiC, and Yttrium aluminum garnet (YAG). (D/0.5Λ)≥2.5 is satisfied where D indicates the depth of groove; and Λ indicates the pitch of the arranged grooves in the periodic structure. The unit of Λ is identical to the unit of D.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.