Multilayer polishing pads made by the methods for centrifugal casting of polymer polish pads
US10722997B2 · kind B2 · utility
2Cited by
23References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 5, 2014 |
| Grant date | Jul 28, 2020 |
| Priority date | — |
| Expiry date | Jun 5, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67046
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method for making a multilayer polishing pad includes rotating a cylinder about a central axis. The cylinder encloses in an interior space a single polymer mixture that phase separates under centrifugal force. The method also includes forming the polishing pad from at least some of a polymer formed after the polymer mixture has reacted. The method includes forming at least two distinct layers in the polishing pad by casting and gelling sequentially at least two different polymers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.