Microelectromechanical device with multiple hinges
US10723618B2 · kind B2 · utility
0Cited by
8References
20Claims
0Family size
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Key dates
| Filing date | Oct 23, 2015 |
| Grant date | Jul 28, 2020 |
| Priority date | — |
| Expiry date | Mar 7, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2207/053
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An example microelectromechanical system (MEMS) switch comprises a hinge plane having two or more intersecting hinges; a switch plate; and a plurality of electrostatic pads. Selective activation of the electrostatic pads causes torsion of at least one of the two or more intersecting hinges to tilt the switch plate to a selected one of three or more positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.