Etchant and method of manufacturing display device by using the same
US10723946B2 · kind B2 · utility
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7Claims
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Key dates
| Filing date | Oct 10, 2018 |
| Grant date | Jul 28, 2020 |
| Priority date | — |
| Expiry date | Nov 14, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K59/8731
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An etchant includes: based on a total weight of the etchant, about 1 wt % to about 15 wt % of sulfurized peroxide, about 5 wt % to about 10 wt % of nitric acid, about 20 wt % to about 40 wt % of organic acid, about 0.05 wt % to about 5 wt % of ferric nitrate, about 0.1 wt % to about 5 wt % of ionic sequestrant, and 0.1 wt % to 5 wt % of corrosion inhibitor, wherein a remaining amount is deionized water.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.