Modulated air surface particle detector
US10725061B2 · kind B2 · utility
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3References
17Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 16, 2018 |
| Grant date | Jul 28, 2020 |
| Priority date | — |
| Expiry date | Aug 16, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/0019
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for counting particles on a sample surface includes a scanner probe having a first opening for receiving particles from a sample surface and one or more second openings, a particle detector for detecting particles passed there-through, a modulator for modulating air flowing there-through, a pump for producing a first airstream flowing from the first opening and through the particle detector, and for producing a second airstream flowing through the modulator and to the one or more second openings, and control circuitry for controlling the modulator to modulate an amplitude of the second airstream.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.