Apparatus and method for monitoring dielectric constant of a substrate
US10725076B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 8, 2018 |
| Grant date | Jul 28, 2020 |
| Priority date | — |
| Expiry date | Jan 29, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R27/2623
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for monitoring dielectric constant of a substrate includes a resonator structure formed on a surface of the substrate. A distal end of a waveguide is coupled to the resonator structure and spaced apart from the resonator structure such that a gap is provided between the distal end of the waveguide and the resonator structure. An excitation energy is coupled to the resonator structure out of the waveguide, and a response energy from the resonator structure is coupled into the waveguide and is detected at a proximal end of the waveguide. A detector detects the response energy received at the proximal end of the waveguide and generates a signal indicative of the detected response energy. A processor is coupled to the detector for receiving the signal indicative of the detected response energy and processing the signal to determine dielectric constant of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.