Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing
US10726231B2 · kind B2 · utility
18Cited by
28References
10Claims
0Family size
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Key dates
| Filing date | Dec 22, 2017 |
| Grant date | Jul 28, 2020 |
| Priority date | — |
| Expiry date | May 10, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/0792
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Microelectromechanical (MEMS) devices and associated methods are disclosed. Piezoelectric MEMS transducers (PMUTs) suitable for integration with complementary metal oxide semiconductor (CMOS) integrated circuit (IC), as well as PMUT arrays having high fill factor for fingerprint sensing, are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.