Contamination-repellent mirror and method for producing the same

US10726965B2 · kind B2 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• Friedrich-Schiller-Universitat Jena · DE

Inventors

• Sven Schröder · Kassel, DE
• Nadja Felde · Jena, DE
• Luisa Coriand · Jena, DE
• Marcus Trost · Jena, DE
• Gunther Notni · Jena, DE

Key dates

• Filing date: Apr 26, 2019
• Grant date: Jul 28, 2020
• Expiry date: Apr 26, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B27/0006
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A contamination-repellent mirror and a method for producing the same. In an embodiment a contamination-repellent mirror includes a mirror layer disposed on a substrate, wherein the mirror layer has a reflection maximum in a wavelength range between 1 nm and 50 nm, a nanorough layer arranged on the mirror layer, wherein the nanorough layer has an rms roughness between 1 nm and 50 nm, and wherein a hygrophobic cover layer is arranged on the nanorough layer or the nanorough layer comprises a hygrophobic material.