Switch cell having a semiconductor switch element and micro-electromechanical switch element

US10727017B2 · kind B2 · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Anne Bauer · Fürth, DE
• Werner Hartmann · Hamburg, DE
• Holger Schönherr · Feucht, DE

Key dates

• Filing date: Jul 18, 2017
• Grant date: Jul 28, 2020
• Expiry date: Jul 18, 2037

Classification

• Technology area (CPC —): General

Abstract

Various embodiments include a switch cell comprising: a semiconductor switch element; a micro-electromechanical switch element; and an electronic actuation circuit. The semiconductor switch element and the micro-electromechanical switch element are connected in parallel. In a switch-off process for the switch cell, the semiconductor switch element is switched off after the micro-electromechanical switch element is switched off.