Mems friction drive linear motor
US10727765B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 27, 2017 |
| Grant date | Jul 28, 2020 |
| Priority date | — |
| Expiry date | Jul 28, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/051
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The friction driven linear motor includes a slide element with a portion with a pair of parallel straight sides. The slide element is contiguous with a zig-zag spring-like element, which is contiguous with an anchor block, which is contiguous with a MEMS substrate. The zig-zag spring-like element deforms as the slide element moves away from the anchor block. There are opposing pairs of v-beam thermal actuators. Each actuator includes a projecting cantilever beam with an end tip cycled to impinge, angularly, the slide element and extend, therein frictionally pushing the slide. A modulating current ohmically cycles the actuator from retraction to braking to pushing. At high frequencies the cantilever beam never fully retracts. The entire linear motor is composed of and is etched on a MEMS substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.