Structure for detecting electromagnetic radiation of the bolometer type and method for manufacturing such a structure
US10732050B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 19, 2017 |
| Grant date | Aug 4, 2020 |
| Priority date | — |
| Expiry date | Sep 19, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F77/122
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A bolometer type detection structure for detecting electromagnetic radiation is provided, including a MOSFET transistor associated with a first absorbing element in order to detect an increase in temperature of the first absorbing element during absorption of the electromagnetic radiation, the transistor including at least one first and at least one second zones, at least one third zone separating the first and second zones from each other, and at least one first gate electrode arranged to bias the third zone, the first gate electrode including at least one first metal portion forming the first absorbing element, the first metal portion having a thickness Ep satisfying: where ρ is a resistivity of a metal material forming the at least one first metal portion. A process for manufacturing the structure is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.