Patent · US Active

Gas sensors with contact pads

US10732161B2 · kind B2 · utility

0Cited by

11References

20Claims

0Family size

Assignee

United States of America as represented by the Administrator of NASA · US

Inventors

Jennifer C. Xu · Westlake, US
Gary W. Hunter · Oberlin, US

Key dates

Filing date	May 4, 2018
Grant date	Aug 4, 2020
Priority date	—
Expiry date	Jan 24, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH10D62/8325
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Systems, methods, and other embodiments associated with gas detecting sensors. According to one embodiment, a gas sensor includes a metal layer, a barrier interlayer, a substrate layer, a first insulating layer, a conduction path, a contact pad, and a second insulating layer. The conduction path connects the metal layer to the contact pad. The second insulating layer prevents diffusion through the contact pad, the conduction path, or the metal layer. The sensor includes a wire bonded electrical connection to the contact pad such that voltage can be determined and/or applied.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.