Vibrating beam accelerometer
US10732195B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 12, 2018 |
| Grant date | Aug 4, 2020 |
| Priority date | — |
| Expiry date | Feb 7, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5663
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A proof mass assembly comprising a first and a second resonator, each resonator comprising a first and a second bond pad, and a pair of elongated tines, wherein the first and the second bond pads are positioned at opposite ends of the elongated tines; a proof mass comprising a first and a second major surface, the first major surface of the proof mass comprising a bond region including at least one channel extending in a direction substantially parallel to a longitudinal axis of the elongated tines of the first resonator; a proof support comprising a first and a second major surface; at least one flexure connecting the proof mass to the proof support; and an adhesive bonding the first bond pad of the first resonator to the bond region and bonding the second bond pad of the first resonator to the first major surface of the proof support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.