Seal monitor for probe or test chamber
US10732218B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 26, 2015 |
| Grant date | Aug 4, 2020 |
| Priority date | — |
| Expiry date | Feb 4, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2877
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of checking a seal of a probe chamber or test chamber (thermal chamber) during a freezing temperature chamber condition. The thermal chamber provided includes a probe card or a contactor for electrically testing a semiconductor device under test (DUT), a gas inlet, a chiller which provides a freezing chamber temperature, and a pressure sensor for sensing a pressure in the thermal chamber (chamber pressure). Using the pressure sensor, the chamber pressure is sensed while flowing a dry gas through the gas inlet sufficient to render the chamber pressure a positive pressure. The positive pressure is compared to a reference pressure, and from the comparing it is determined whether the thermal chamber is properly sealed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.